Choose location

home-icon/Home / About us / R&D projects / Ścieżka dla Mazowsza

Ścieżka dla Mazowsza

8 June 2022

Select project:
Finished project

The technology of the production of innovative epitaxial structures and VCSEL laser devices

  • Agreement no.
  • Duration:
  • Overall budget:
  • Eligible costs:
  • Co-funding:
  • MAZOWSZE/0032/19-00
  • 01/01/2020 – 31/03/2023
  • PLN 16,302,135.55
  • PLN 16,302,135.55
  • PLN 12,398,365.18
  • Agreement no. MAZOWSZE/0032/19-00
  • Duration: 01/01/2020 – 31/03/2023
  • Overall budget: PLN 16,302,135.55
  • Eligible costs: PLN 16,302,135.55
  • Co-funding: PLN 12,398,365.18

The goal of the project was to develop new solutions in MOCVD technology for the fabrication of advanced photonic hetero-structures of epitaxial III-V semiconductor compounds based on GaAs and InP.

The project developed advanced technologies for the fabrication of III-V semiconductor materials used in the production of vertical cavity resonant lasers (VCSELs), quantum cascade lasers (QCLs) and edge lasers (EELs) using original innovative solutions. The development of VCSEL technology also required theoretical work on simulating a hetero-structure design for 850-nm emission and single-mode operation optimized for maximum optical power and, in the case of the laser array, ensuring uniform temperature distribution.

As a result of technological, research and theoretical work, innovative solutions have been developed on a global scale for advanced hetero-structures of epitaxial semiconductor compounds, fabricated by a production method of large-scale MOCVD technology not available in Poland so far, using the largest commercially available reactor.

The quality of the manufactured epitaxial wafers for sale meets the current requirements of chip manufacturers, as evidenced by the positive results of the product qualification processes. Intense and very fruitful project cooperation with academic partners – Lodz University of Technology and Warsaw University of Technology – has significantly contributed to the achievement of such innovative, from a technological as well as scientific point of view, world-class results. During the three years of the project, VIGO significantly strengthened the second pillar of its business – in addition to the production of innovative IR detectors – the production of the most advanced semiconductor materials for modern photonics and microelectronics, increasing its competitiveness and pioneering in the global market and stimulating innovation in the Polish economy.

Among the greatest achievements of the project are the development of technologies for the production of epitaxial structures of quantum cascade lasers (QCLs), VCSEL lasers on GaAs substrates with diameters of 2, 3, 4 and 6 inches, technologies for the fabrication of instrument-lasers, as well as laser arrays. The VCSEL lasers produced are the first such instruments made in Poland. In the world, they are used in many fields, such as telecommunications, optical radar or detection, and the demand for them is growing. As a result of the project results, VIGO Company is preparing to manufacture VCSEL epitaxial wafers, while expanding the product portfolio to include other emission ranges and other innovative solutions.

The project was co-financed by the National Center for Research and Development under the “Path for Mazovia” Call.

Finished project


  • Agreement no.
  • Duration:
  • Overall budget:
  • Eligible costs:
  • Co-funding:
  • Project coordinator:
  • Project partner:
  • MAZOWSZE/0090/19-00
  • 01/10/2019 – 31/12/2022
  • PLN 20,645,225.82
  • PLN 20,645,225.82
  • PLN 14,280,549.68
  • VIGO Photonics S.A.
  • Warsaw University of Technology
  • Agreement no. MAZOWSZE/0090/19-00
  • Duration: 01/10/2019 – 31/12/2022
  • Overall budget: PLN 20,645,225.82
  • Eligible costs: PLN 20,645,225.82
  • Co-funding: PLN 14,280,549.68
  • Project coordinator: VIGO Photonics S.A.
  • Project partner: Warsaw University of Technology

The main objective of the project was to develop sensors for Industry 4.0 and the Internet of Things.

Project enabled the development of sensors for Industry 4.0 and the Internet of Things, and was based on market-oriented design methods. As part of the ongoing work, the following were designed, optimized and developed:

– sensing modules with multi-element infrared detectors used mainly for monitoring industrial processes; they will allow fast and accurate measurement of parameters and their reading;

– miniature infrared detection modules providing simplicity of operation to the user, high availability by minimizing the price, having mass application mainly in any sensor network systems.

The realization of the project made it possible to market low-cost integrated photonic subsystems based on infrared detectors integrated with signal amplification electronics and sensors allowing self-diagnosis, calibration and automatic data processing, as well as providing ease of communication with other devices and networks. The main applications for the developed sensors are: medicine, environmental monitoring (smart homes, smart cities, transportation), Industry 4.0, food production and processing, industrial optical sorters and special applications for multi-element modules.

As part of the implementation of this project, VIGO participated in:

– improvement of selected elements of processing, assembly and encapsulation of infrared detectors;

– development of diffraction lenses for infrared detectors;

– Development of electronics for detector modules;

– development of multi-element infrared detectors;

– Development of infrared detectors with III-V materials mounted directly on PCBs;

– Integration and optimization of modules with multi-element infrared detectors and detection modules with detectors from III-V materials mounted directly on PCBs with the first amplification stage.

The project was co-financed by the National Center for Research and Development under the “Path for Mazovia” Call.